Con­focal Laser Scan­ning Mi­cro­scope LEXT OLS3100

The Confocal Laser Scanning Microscope Olympus LEXT OLS3100 offers the possibility of conducting high-resolution topography appraisal, particle analysis, and layer thickness or surface roughness measurements.

Technical Specifications:

  • Magnification 5x to 100x, additional 6x optical zoom function
  • Maximum distance from specimen (50 x long-range objective lens)
  • Axial resolution: max. 10 nm
  • Lateral resolution: max. 120 nm
  • Max. angle 70°, undercuts and overhangs not displayable


  • Surface analysis
  • Topography measurements
  • Surface roughness measurement
  • Particle analysis